Rotary Mechanical Pump
Figure 2-12. Schematic of vacuum deposition system. high 10 10 torr vacuum deposition and surface analytical equipment, but are being supplanted by turbomolecular and cryopumps. The broad variety of applications requiring a low-pressure environment is reflected in a corresponding diversity of vacuum system design. One such system shown in Fig. 2-12 is employed for vacuum evaporation of metals. The basic pumping system consists of a nominal 15-cm diameter, multistage oil-diffusion pump backed by...
Milton Ohring
Stevens Institute of Technology Department of Materials Science and Engineering Hoboken, New Jersey Academic Press San Diego New York Boston London Sydney Tokyo Toronto This book is printed on acid-free paper. 5 Copyright 1992 by Academic Press All rights reserved. No part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from...
A Review of Materials Science
A cursory consideration of the vast body of solid substances reveals what outwardly appears to be an endless multitude of external forms and structures possessing a bewildering variety of properties. The branch of study known as materials science and engineering evolved in part to classify those features that are common among the structure and properties of different materials in a manner somewhat reminiscent of chemical or biological classification schemes. This dramatically reduces the...